发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device wherein a breakdown strength is improved with no on-resistance increased. SOLUTION: A p-type well region 4 and an n+ type drain region 2, away from each other, are formed in an n-type semiconductor layer 1 on an insulating layer 11, and an n+ type source region 3 is formed in the p-type well region 4. The p-type well region 4 is formed as deep as the insulating layer 11 from the surface of the n-type semiconductor layer 1. A source electrode 8 is so formed as to bridge between the n+ type source region 3 and a p+ type base contact region 9 in the p-type well region 4. Since a rough is provided at an interface S1 between the insulating layer 11 and a semiconductor layer on it, in other words, at the interface between the insulating layer 11 and the n-type semiconductor layer 1 as well as at the interface between the insulating layer 11 and the p-type well region 4, the area of interface S1 is larger compared to a case of flatness.
申请公布号 JP2000307121(A) 申请公布日期 2000.11.02
申请号 JP19990116453 申请日期 1999.04.23
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 SUZUMURA MASAHIKO;SUZUKI YUJI;HAYAZAKI YOSHIKI;SHIRAI YOSHIFUMI;KISHIDA TAKASHI;TAKANO MASAMICHI;YOSHIDA TAKESHI
分类号 H01L29/786;(IPC1-7):H01L29/786 主分类号 H01L29/786
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