MANUFACTURE OF METALLIC WIRING

摘要

PROBLEM TO BE SOLVED: To effectively suppress hillocks while keeping low specific resistance, by anodizing the aluminum wiring or the like containing a rare earth element in the range of specified weight %, in nonaqueous solution containing salt of inorganic oxo acid or organic carboxylic acid. SOLUTION: Aluminum wiring which contains a rare earth element not less than 0.01 wt.% and not more than 8 wt.%, aluminum wiring which contains a rare earth element and whose specific resistance is 10μΩ.cm or under, or aluminum wiring which contains a rare earth element and whose peak intensity ratio between the peak of Al(111) and Al(220) by the X-ray diffraction using a CuKαray or whose integrated intensity ratio Al(220)/Al(111) is not less than 0.01 and not more than 10000 is anodized in nonaqueous solution containing the salt of inorganic oxo acid or the salt of organic carboxyl acid. Metallic wiring containing aluminum whose specific resistance is low and whose hillock suppressive effect is high can be made at low cost. It raises the reliability on the gate wiring of a TFT element or the wiring of an integrated circuit or the like.