| 摘要 |
PROBLEM TO BE SOLVED: To obtain a microlens array which enhances the light receiving efficiency of the light receiving part of a solid-state image pickup element and enhances the sensitivity and image quality of a solid-state image pickup device. SOLUTION: A light receiving part 12, a light shielding part 13, a flattening layer 14, a color filter layer 15 and an overcoat layer 16 are formed on a semiconductor substrate 11, a resin pattern layer is formed by using a positive type resist adjusted so as to ensure an extinction coefficient of 0.57×10-3 at 450 nm wavelength and convex microlenses 21 are formed by heating and softening the resin pattern layer at 130 deg.C to obtain the objective solid-state image pickup element 10 with a microlens array 22. When a filling rate improving layer 31 having 0.09μm thickness is further formed on the microlenses 21 using an acrylic resin adjusted so as to ensure a refractive index of 1.45 at 450 nm wavelength, the objective solid-state image pickup element 20 with a microlens array 32 is obtained.
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