发明名称 OPTICAL CHARACTERISTIC-MEASURING INSTRUMENT AND DIFFUSION PLATE
摘要 PROBLEM TO BE SOLVED: To reduce a measurement error caused by the scattering of the sensitivity of the surface of a photo detector by providing a diffusion plate that is made of quartz or a material containing quartz in front of a light reception part. SOLUTION: Diffusion plates 14 and 15 are provided before a sample light reception part 9 and a monitor light reception part 10, respectively. The diffusion plates are made of quartz or a material containing quartz and are preferably roughened by such mechanical treatment with sandpaper and/or such chemical treatment with fluoric acid. Light entering the sample light reception part 9 and the monitor light reception part 10 is diffused appropriately by the diffusion plates and uniformly enter the surface of the photo detector of each light reception part, thus eliminating the scattering of the sensitivity of the surface of the photo detector, that of sensitivity caused by the diameter of an incident beam, or the like for more accurate measurement.
申请公布号 JP2000304657(A) 申请公布日期 2000.11.02
申请号 JP19990116574 申请日期 1999.04.23
申请人 NIKON CORP 发明人 NIIKURA HIROSHI
分类号 G01N21/01;G01M11/04;G02B5/02;(IPC1-7):G01M11/04 主分类号 G01N21/01
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