| 摘要 |
PROBLEM TO BE SOLVED: To obtain a planar magnetic element, in which magnetic saturation is retarded and DC superposition characteristics are made satisfactory, while facilitating miniaturization and shortening the manufacturing time by composing a thin film of a magnetic material to have a sponge-like structure. SOLUTION: Magnetic films 11, 12 have a sponge-like structure, having a plurality of fine voids 10, and an amorphous soft magnetic film is employed as the magnetic film 11, 12, for example. The magnetic film 11, 12 is formed by depositing CoHfTaPd under conditions of high-frequency power of about 400 W and Ar gas pressure of about 1 Pa. The magnetic film 11, 12 is heat treated at 350-400 deg.C in a rotational field of about 600 Oe or higher and imparted with monoaxial anisotropy in the direction orthogonal to the direction of the field generated from a planar coil in order to retard magnetic saturation. According to the method, a planar magnetic element having superior DC superposition characteristics in the large current region can be produced at a high rate with good reproducibility, while keeping a small element area.
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