发明名称 RETAINER
摘要 PROBLEM TO BE SOLVED: To change a retaining position of a retaining member easily, with simple structure, without exchanging a retainer even when the size of an object to be retained is changed, and reduce the preparatory working time before measurement. SOLUTION: Moving stands 6 having retaining members 5 are made to engage with a driving means 7. The amount of movement of the moving stands 6 is read with a length measuring means 8. The read value is fed back to the driving means 7, and control to a desired position is performed. After that, the moving stands 6 are not directly fixed to a moving member 7m of the moving means 7, but fixed to a holding member 4 by using positioning means 9 (a driving part 9a, a sensor for confirming fixture and a clamp rod 9b). Thereby the moving stands 6 can be arranged at a desired position with high precision.
申请公布号 JP2000304525(A) 申请公布日期 2000.11.02
申请号 JP19990109566 申请日期 1999.04.16
申请人 NIKON CORP 发明人 ITABASHI KATSUTOSHI
分类号 G01B21/00;G02B7/00;G02B7/02;(IPC1-7):G01B21/00 主分类号 G01B21/00
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