发明名称 PRODUCTION METHODS OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL AND COMPOUND SEMICONDUCTOR ELEMENT
摘要 <p>Production methods of a compound semiconductor single crystal and a compound semiconductor element, capable of forming a specified pattern without requiring many steps. A group V element component constituting a III-V compound semiconductor single crystal, or a group VI element component constituting a II-VI compound semiconductor single crystal is reduced in a pattern form to below a composition ratio expressed in the chemical formula of the compound semiconductor.</p>
申请公布号 WO0065642(A1) 申请公布日期 2000.11.02
申请号 WO2000JP02683 申请日期 2000.04.25
申请人 SHIN-ETSU HANDOTAI CO., LTD.;ISHIZAKI, JUNYA;NOTO, NOBUHIKO 发明人 ISHIZAKI, JUNYA;NOTO, NOBUHIKO
分类号 C30B33/00;H01L21/308;H01L21/467;H01L23/544;(IPC1-7):H01L21/306 主分类号 C30B33/00
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