发明名称 |
PRODUCTION METHODS OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL AND COMPOUND SEMICONDUCTOR ELEMENT |
摘要 |
<p>Production methods of a compound semiconductor single crystal and a compound semiconductor element, capable of forming a specified pattern without requiring many steps. A group V element component constituting a III-V compound semiconductor single crystal, or a group VI element component constituting a II-VI compound semiconductor single crystal is reduced in a pattern form to below a composition ratio expressed in the chemical formula of the compound semiconductor.</p> |
申请公布号 |
WO0065642(A1) |
申请公布日期 |
2000.11.02 |
申请号 |
WO2000JP02683 |
申请日期 |
2000.04.25 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD.;ISHIZAKI, JUNYA;NOTO, NOBUHIKO |
发明人 |
ISHIZAKI, JUNYA;NOTO, NOBUHIKO |
分类号 |
C30B33/00;H01L21/308;H01L21/467;H01L23/544;(IPC1-7):H01L21/306 |
主分类号 |
C30B33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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