| 摘要 |
PROBLEM TO BE SOLVED: To optimize the refractive index of a film to be formed and to provide a device having excellent flowing stability in the process by incorporating SiO2, TiO2 and ZrO2 into an insulating layer to be formed on an ITO electrode. SOLUTION: The insulating layer formed on an ITO electrode contains SiO2, TiO2 and ZrO2. For example, an alumina sol having 100 to 200Åaverage particle size as metal oxide fine particles anti ethylsilicate as a metal alkoxide are diluted in a solvent such as methanol, ethanol-A methylcellusolve into 5 to 10 wt.% concn. of the solid content for use. In order to control the refractive index, tetraethoxytitanium and tetraethoxyzirconium are diluted in a similar solvent into 5 to 10 wt.% concn. calculated as TiO and ZrO2 and then mixed with the aforementioned soln. Then the liquid sol is applied on a substrate by roll coating while controlling the film thickness to 800 to 900Å, and heated at 400 deg.C for one hour to obtain a stable insulating layer. |
