| 摘要 |
PROBLEM TO BE SOLVED: To prevent cleanliness in an adjacent clean module from being deteriorated owing to invasion of external duct and air flow turbulence caused by opening and dust production by a worker. SOLUTION: A clean space is formed by coupling a plurality of clean modules including a filter equipped fan unit 2 and a discharge outlet 3 through a coupling section 10. In the state where the respective clean modules are coupled and operated, eyelids 7, 8 are provided on the coupling section 10 of the clean module for controlling an air stream in each internal space for each clean module. Hereby, even when there occur disturbance of an air stream and invasion of external dust owing to opening of the clean module when a worker enters the clean room to perform inspection of any trouble of an apparatus, it is possible to suppress inflow of the air stream into an adjacent clean module. For this, repair and inspection are achieved without stopping production of adjacent clean module and without being influenced by production conditions to ensure high productivity operation.
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