| 发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES |
| 摘要 |
<p>PURPOSE: A method for manufacturing semiconductor devices is provided to reduce the step of an alignment key formed in a scribe line region. CONSTITUTION: A method for manufacturing semiconductor devices having a plurality of chip regions defined by a scribe line region forms a plurality of alignment keys(11) used when at least single integrated circuits is formed in each of the chip regions. At least one alignment key of the alignment keys(11) is formed on a material consisting of the integrated circuit.</p> |
| 申请公布号 |
KR100268426(B1) |
申请公布日期 |
2000.11.01 |
| 申请号 |
KR19980016336 |
申请日期 |
1998.05.07 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JEONG, DONG HUN;KIM, JAE HWAN |
| 分类号 |
H01L21/301;H01L21/027;H01L23/544;(IPC1-7):H01L21/027 |
主分类号 |
H01L21/301 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
