| 摘要 |
PURPOSE: A method for manufacturing a liquid crystal display is provided to prevent a pattern badness of a pixel electrode and an aperture ratio of a pixel, by improving a junction coupling force of an indium pixel electrode formed on an organic film. CONSTITUTION: A thin film transistor(TFT) is formed on a transparent substrate(110), and an organic film(155) including a C-H or C-F couple structure is coated on the thin film transistor. A doped film(156) is formed by implanting such an ion as Si, P, Ge, B, As, Ba, Ti, Tb, or Bi on a surface of the organic film. A pixel electrode(140) made of an indium tin oxide film is formed on the doped film. The pixel electrode(140) is contact with a drain electrode(170b) of the thin film transistor via a contact hole. The doped film(156) can be oxidized by use of O2 etching in order to reinforce a couple force between the organic film and the indium tin oxide film. |
