A VISION SYSTEM OF A EQUIPMENT FOR MANUFACTURING A SEMICONDUCTOR

摘要

PURPOSE: A vision system in a semiconductor machining apparatus is provided to improve the test speed of a vision system by processing at high speed image signals of a camera sequentially in a video interface controller and a video memory controller. CONSTITUTION: A vision system in a semiconductor machining apparatus includes a trigger for controlling operation of a camera. A camera converts an image into an analog image signal. An A/D converter converts the analog image signal into digital signals. A digital interface assigns each of pixels of the digital signal with numbers. A frame memory temporarily stores a number type image signal of the digital interface and an output signal of a microprocessor. A video interface controller and a video memory controller controls the flow of processing signal between the frame memory, the microprocessor and a main control means. A data memory stores reference data to provide them when the microprocessor is compared/calculated. The microprocessor compares/calculates the number type image signal from the frame memory with the reference data and returns the number type image signal and the final calculated value to the frame memory. The main control means determines whether semi-manufactured goods is defective or not using the output signal from the microprocessor temporarily stored at the frame memory to control the entire operation of the semiconductor machining apparatus. A monitor displays the image signal from the main control means.