MOVABLE MICRO MIRROR FOR A VIDEO DISPLAY APPARATUS AND MANUFACTURING METHOD THEREFOR

摘要

PURPOSE: A method for manufacturing a moving micro mirror for an image display device is provided to prevent the strength of a joint hinge from being weakened and reduce the number of masks necessary for a mask process. CONSTITUTION: A pin member(12b) is formed on a substrates(11), and a top sacrifice layer is formed reusing the first mask. When forming an opening, the opening is formed by use of the pin member(12b) as a mask. A staple member(20) is formed as the second mask(24) at the second structure. After forming the staple member(20), a post-film sacrifice layer and an opening for forming a pillar member are formed on the staple member(20). After forming the staple member(20), The moving is provided to the pin member, the staple member(20), and the structure.