| 摘要 |
PURPOSE: An air knife for drying a substrate is provided to be capable of uniformly spraying air and controlling the ejection amount of partial air due to lengthen progress distance of air. CONSTITUTION: An air knife for drying a substrate includes a main valve for absorbing air. A circular pipe(52) has a socket machining unit(52a) that couples the circular pipe(52) to the main valve and exhausts air absorbed from the main valve via an exhaust hole(52b) formed on the circular pipe(52). A rectangular pipe(53) into which the circular pipe(52) is inserted and sprays air exhausted from the exhaust hole(52b) toward a slit groove(53a) formed at the bottom of the rectangular pipe(53).
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