发明名称 Surface texture measuring apparatus
摘要 A surface texture measuring apparatus allows effects of vibration disturbance to be removed. The surface texture measuring apparatus is provided with a main surface texture measuring apparatus (16, 18, 20, 22) and a small surface texture measuring apparatus (26). The small surface texture measuring apparatus (26) detects the amount of vibration of a workpiece (14). The main surface texture measuring apparatus (16, 18, 20, 22) conducts measurement based on the detected unevenness of the surface of the workpiece (14) and on the amount of vibration detected by the small surface texture measuring apparatus (26).
申请公布号 GB2349470(A) 申请公布日期 2000.11.01
申请号 GB20000010091 申请日期 2000.04.25
申请人 * MITUTOYO CORPORATION 发明人 * MITUTOYO CORPORATION;HIROYUKI * HIDAKA;TOSHIHIRO * KANEMATSU;HIROOMI * HONDA;HIDEKI * MISHIMA;TAKAO * ISHITOYA
分类号 G01B21/20;G01B21/30;(IPC1-7):G01B5/28 主分类号 G01B21/20
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