METHOD FOR MULTI-LAYER METAL LINE

摘要

PURPOSE: A method for forming a multi-layer metal line is provided to flatten easily an interlayer dielectric by forming an insulating layer spacer at a sidewall of a lower metal line. CONSTITUTION: A metal layer is formed on an upper portion of a lower insulating layer(1). A thin insulating layer is deposited on the metal layer. The thin insulating layer and the metal layer are etched partially and a groove is formed thereon by using a metal line mask. An insulating layer spacer is formed at a sidewall of the groove. The remaining metal layer of a bottom of the groove is etched by using the thin insulating layer and the insulating layer spacer as a mask. A convex metal line is formed by etching the remaining metal layer of the bottom of the groove. The first insulating layer(6) is formed on the whole surface. The second insulating layer(7) is formed on the first insulating layer(6).