| 摘要 |
PROBLEM TO BE SOLVED: To obtain excellent conductivity and productivity by exposing the body to be treated to a plasma discharge treating system executing plasma treatment in such a manner that voltage is applied on at least two confronted electrodes in the presence of reactive gas, mounting the body to be treated on a space between these electrodes and forming a transparent conductive film on the body to be treated. SOLUTION: The reactive gas contains organic gas of indium, zinc, tin or titanium and inorganic gas of oxygen, carbon monoxide, carbon dioxide, nitrogen monoxide, nitrogen dioxide, ozone, or the like, and as the organic gas, the one obtd. by bubbling a soln. of zinc acetylacetate, triethylindium, diethylzinc, dimethylzinc, tetraethyltin or tetramethyltin is preferably used. The atmospheric pressure in the treating system is controlled to 0.005 to 20 Torr, and an inert gas such as gaseous argon may be present. Preferably, the space between the electrodes may be applied with pulselike voltage in the range of 1 to 100 kV/cm.
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