Multilayer micro-gas rheostat with electrical-heater control of gas flow

摘要

A device and method for controlling small flows of gas, such as would be used by a satellite (or microsatellite) for orientation thrusters includes a photoetched silicon body etched to provide one or more particular flow paths, and optionally filters, where the flow path is defined by the silicon body and a sealing glass layer bonded thereto. Flow is controlled through the flow path(s) by heating the body to decrease the gas flow.