Apparatus for measuring coating thickness on a substrate and method thereof

摘要

The invention is directed to a method and apparatus for determining coating thickness on a substrate. The apparatus comprises a jig and fixture combination where the jig includes a moveable stop that fixes a position for placing a substrate specimen in the fixture, and where the fixture includes an inclined plane for receiving the substrate specimen at a predetermined angle theta that slopes in a downward direction to engage the moveable stop. A clamp that holds the substrate specimen at a fixed position against moveable stop and inclined plane when said fixture is separated from said jig to determine coating thickness on the substrate. The method for determining coating thickness using the combination jig and fixture arrangement includes placing and clamping a substrate specimen at a predetermined position in the fixture in response to a bound fixed by the moveable stop of the jig, grinding a measuring surface along a portion of the substrate specimen that is clamped in the fixture, and repositioning the substrate specimen to place the measuring surface prepared by grinding in a plane parallel to the focal plane of a measuring device used to determine coating thickness.