| 发明名称 |
APPARATUS FOR DEPOSITING BARRIER FILM ON THREE DIMENSIONAL ARTICLES |
| 摘要 |
The invention relates to an apparatus for use in a Plasma Enhanced Chemical Vapor Deposition (PECVD) process whereby a coating of inorganic material is deposited on three-dimensional articles, including low melting temperature polymer articles. The coating possesses excellent gas and/or water vapor barrier properties.
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| 申请公布号 |
CA2214921(C) |
申请公布日期 |
2000.10.31 |
| 申请号 |
CA19972214921 |
申请日期 |
1997.09.08 |
| 申请人 |
BECTON, DICKINSON AND COMPANY |
发明人 |
MONTGOMERY, DAVID B. |
| 分类号 |
C08J7/04;C08J7/00;C08J7/18;C23C16/50;C23C16/509;H01J37/32;(IPC1-7):C23C16/00 |
主分类号 |
C08J7/04 |
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