| 摘要 |
PROBLEM TO BE SOLVED: To facilitate connecting work of piping and arrangement even in the case of using an air spindle in a clean room by making the exhaust piping to be connected to an exhaust port and the air supply piping to an air supply port in a simple connecting structure in the case of exhausting exhaust air from a bearing to the exhaust port after introducing it to a motor for cooling. SOLUTION: An air introduction passage 43 to introduce most of exhaust air from bearings 11, 22 to a motor 38 and an air exhaust passage 57 to exhaust air after cooling the motor 38 to an exhaust port 57 are provided in each of wall parts of a bearing housing 2 and a motor housing 3, an exhaust port 56 is arranged in the vicinity of an air supply port 15 on an outer periphery of the bearing housing 2 and both of the pipings are arranged on the side of the bearing housing 2 in in the lump on an air spindle on which a static pressure type radial bearing 11 and a thrust bearing to support an axis of rotation 6 by pressure air from the air supply port are respectively provided in the bearing housing 2 and a motor 38 for driving of the axis of rotation 6 is provided in the motor housing 3.
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