| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of a part of a film and the powder of unreactants to be generated in the process of the production of a multilayer film by suppressing the drop of the pressure in a reaction chamber for a period till the film formation of the following layer is started directly after the turning- off of an RF power source upon the completion of the film formation of a certain layer. SOLUTION: In the case film formation is executed as to an A layer and a B layer, the film formation is executed with gaseous materials 11 and 12 as for the A layer, and with gaseous materials 12 and 13 as for the B layer. When the vacuum in a reaction chamber 1 remarkably deviates in the case the film formation turns from the A layer to the B layer, a part of the film peeled from the inner wall of a vacuum vessel, electrodes, or the like, and the powder of unreactants are dropped away and deposited on the substrate. As a countermeasure therefor, the remarkable deviation of the vacuum in the reaction chamber 1 is prevented. Concretely, after the completion of the film formation in the A layer, stop valves 31-32 and 51-52 for the A layer are closed, and simultaneously, stop valves 32-33 and 52-53 for the B layer are opened.
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