发明名称 Semiconductor metallization structure
摘要 A high temperature metallization system for use with a semiconductor device (23). The semiconductor device (23) has a multi-layer metallization system (36). An adhesion layer (37) of the metallization system (36) is formed on a semiconductor substrate (20). A barrier layer (38) that contains a nickel alloy is formed on the adhesion layer (37). A protective layer (39) is formed on the barrier layer (38). The barrier layer (38) inhibits solder components from diffusing toward the semiconductor substrate (20) during high temperature processing.
申请公布号 US6140703(A) 申请公布日期 2000.10.31
申请号 US19960774304 申请日期 1996.12.26
申请人 MOTOROLA, INC. 发明人 CRONIN, WAYNE A.;SCRIVNER, BRIAN L.;KOETZ, KIRBY F.;PARSEY, JR., JOHN M.
分类号 H01L21/52;H01L23/482;H01L23/50;(IPC1-7):H01L23/48 主分类号 H01L21/52
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