发明名称 |
METALLIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, AND SURFACE ACOUSTIC WAVE DEVICE USING THE METALLIC THIN FILM AND THE METHOD THEREOF |
摘要 |
By using a dual ion-beam sputtering apparatus, an aluminum thin-film is formed on a glass substrate made of an amorphous material. While radiating an ion beam for assisting the film formation from an ion source onto the glass substrate, the aluminum thin-film is formed by depositing the sputtering ions which are generated by radiating an ion beam onto an aluminum target. |
申请公布号 |
CA2195486(C) |
申请公布日期 |
2000.10.31 |
申请号 |
CA19972195486 |
申请日期 |
1997.01.20 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
NAKANISHI, HIDEFUMI;SAKURAI, ATSUSHI;KOBAYASHI, MASATO;YOSHINO, YUKIO |
分类号 |
C30B23/02 |
主分类号 |
C30B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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