发明名称 VACUUM TANK
摘要 PROBLEM TO BE SOLVED: To make inexpensively formable a vacuum tank of superior pressure resistance without requiring an expensive equipment and technology by storing in the airtight tank a heat-resistant supporting skeleton being brought into contact with the inner face of an airtight tank to support the airtight tank when being vacuumed and separable from the airtight tank. SOLUTION: The airtight tank 1 is formed of a stainless plate material or the like, and a cover 4 is disposed on an upper end flange section 2 through a packing and the inside of the tank is closed. On the other hand, a supporting skeleton 5 to be fitted in the airtight tank 1 is formed separately from the airtight tank 1. Namely four metal vertical frame materials 11 are disposed on the supporting skeleton 5, and the vertical frame materials are connected one another by horizontal frame materials 12 to form four wall face frames. The horizontal frame materials 12 are connected one another by two pair of intermediate vertical frame materials 13 on respective wall face frames to form a grating-shaped supporting skeleton 5. The lower face side of the supporting skeleton 5 is connected by crossing between frame materials 14 to form a bottom frame. Then the supporting skeleton 5 is fitted separably in the airtight tank 1 to form a vacuum tank 10 of superior pressure resistance.
申请公布号 JP2000300980(A) 申请公布日期 2000.10.31
申请号 JP19990111408 申请日期 1999.04.19
申请人 JAPAN FIELD KK 发明人 UCHINO MASAHIDE
分类号 H01L21/304;B01J3/00;B01J3/04;B08B13/00;(IPC1-7):B01J3/00 主分类号 H01L21/304
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