| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic probe and its manufacturing method to prevent cross talks between piezoelectric elements, and to uniform sound fields of ultrasonic beams. SOLUTION: This ultrasonic probe comprises first electrodes 5 provided on a rear side load member 4, a plurality of columnar piezoelectric elements (piezoelectric bodies) 1 arranged on the electrodes 5 so as to form a matrix, second electrodes 6 provided on these piezoelectric elements 1, a plurality of acoustic matching layers 2 arranged on the second electrodes 6 so as to form a matrix, and acoustic lenses 3 arranged on these acoustic matching layers 2 so as to form a matrix. Incidentally, an epoxy based resin 7 is filled around respective piezoelectric elements 1. The first electrodes 5 and the second electrodes 6 are formed of conductive metal films, e.g. gold respectively, and they are divided into matrixes to electrically connect to respective piezoelectric elements 1. |
