发明名称 |
Combined slurry dispenser and rinse arm and method of operation |
摘要 |
The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
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申请公布号 |
US6139406(A) |
申请公布日期 |
2000.10.31 |
申请号 |
US19970879447 |
申请日期 |
1997.06.24 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KENNEDY, DANIEL;FUKSSHIMOV, BORIS;BELITSKY, VICTOR;FISHKIN, BORIS;BROWN, KYLE;OSTERHELD, TOM;BEELER, JEFF;ADDIEGO, GINETTO |
分类号 |
B24B37/04;B24B53/007;B24B57/02;H01L21/304;(IPC1-7):B24B7/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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