| 摘要 |
PROBLEM TO BE SOLVED: To enable the quality of functional cleaning water containing a gas dissolved therein, specifically the characteristics directly relating to cleaning effect, to be evaluated and controlled accurately and conveniently in a simple way by installing an ultrasonic wave radiation section and a particle monitor at a monitoring pipeline which is a branch of the main pipeline for sending dissolved-gas-containing cleaning water. SOLUTION: Ultrapure water is introduced into a degassing membrane apparatus 2 the gas phase side of which is kept at a reduced pressure by a vacuum pump 1; thus, the ultrapure water is subjected to membrane degassing to remove all the kinds of gases contained. The ultrapure water having a vacancy in the gas dissolution capacity caused by the membrane degassing is introduced into a gas dissolution membrane module 3, where a gas sent from a gas source 4 is dissolved through a gas dissolution membrane into the ultrapure water, thus giving dissolved-gas-containing cleaning water. This cleaning water is sent through a main pipeline 5 to a use point 6. The cleaning water introduced into a monitoring pipeline 7 installed between the main pipeline 5 and the use point 6 is irradiated with ultrasonic waves in an ultrasonic wave radiation section 9 to generate microbubbles and then is measured with a particle monitor 10.
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