| 摘要 |
PROBLEM TO BE SOLVED: To provide a package sealing device to prevent the breakage of a package, and a manufacturing method of a surface acoustic wave device using it. SOLUTION: A package sealing device comprises a heater chip 4 to heat a lid 3 to seal an opening part of a package 2, a pulse heat power source 10 to supply the heat to the heater chip 4, a thermocouple 11 to detect the temperature of the heater chip 4, and feed the detected temperature back to the pulse heat power source 10 to control the temperature of the pulse heat power source 10, and a clamp lever 8 to control the position of the heater chip 4, the heater chip 4 comprises a shank portion 4a and a heat generating portion 4b, and implements the sealing process by using the package sealing device whose contact surface to the lid 3 is formed of a metal large in electric resistance and poor in heat conductivity. |
