发明名称 PRODUCTION OF TITANIUM OXIDE FILM AND THE RESULTANT TITANIUM OXIDE FILM
摘要 PROBLEM TO BE SOLVED: To form with a relatively low energy a titanium oxide film of anatase type or partly containing rutile-type titanium oxide on the surface of a substrate by coating the substrate with a titanium oxide precursor followed by irradiating the precursor with rays emitted from a halogen lamp. SOLUTION: This titanium oxide film is obtained by coating the substrate with a titanium oxide precursor followed by irradiating the precursor with rays emitted from a halogen lamp; wherein the titanium oxide precursor means a substance capable of producing titanium oxide by heating, being pref. soluble to water or an organic solvent, being specifically e.g. an alkoxytitanium such as tetramethoxytitanium, tetraethoxytitanium or tetrabutoxytitanium, a reaction product from such a titanium compound as mentioned above and a compound selected from alkanolamines, p- diketones such as acetylacetone complexes and carboxylic acids including lactic acid and phthalic anhydride; for the method of coating on a substrate, roll coating, spin coating, spray coating or the like is usable, and after coated on the substrate, the precursor may be dried at 100-200 deg.C; and the wavelengths of rays emitted from a halogen lamp to be used is recommended to have a spectroscopic distribution in the infrared region of 0.8-50μm.
申请公布号 JP2000302440(A) 申请公布日期 2000.10.31
申请号 JP19990103690 申请日期 1999.04.12
申请人 JSR CORP 发明人 ONO TOSHIO
分类号 C01G23/04;B01J27/135;B01J35/02;C23C18/12;(IPC1-7):C01G23/04 主分类号 C01G23/04
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