Photosensitive compositions and pattern formation method

摘要

PCT No. PCT/JP98/01926 Sec. 371 Date May 12, 1999 Sec. 102(e) Date May 12, 1999 PCT Filed Apr. 27, 1998 PCT Pub. No. WO98/49600 PCT Pub. Date Nov. 5, 1998Photosensitive compositions prepared without use of a chromium compound. The compositions exhibit high resolution and satisfactory sensitivity, and do not cause environmental pollution. The photosensitive compositions contain a water-soluble azide compound which serves as a photocrosslinking agent and poly(N-vinylformamide) that is photocrosslinkable in the presence of the water-soluble azide compound.