发明名称 ELECTRODE PATTERNING FOR A DIFFERENTIAL PZT ACTIVATOR
摘要 <p>A process for fabricating piezoelectric elements each having a wrap-around electrode to be used in a differential actuator design where electrical connections is made to the bottom electrode of the element from the top surface of the element. The wrap-around electrode is formed during the creation of the elements instead of on an element by element basis.</p>
申请公布号 WO2000063978(A2) 申请公布日期 2000.10.26
申请号 US2000010601 申请日期 2000.04.20
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