SILICON FIXTURES FOR WAFER PROCESSING AND METHOD OF FABRICATION

摘要

A silicon tower for removably supporting a plurality of silicon wafers during thermal processing. A preferred embodiment of the tower includes four legs secured on their ends to two bases. A plurality of slots are cut in the legs allowing slidable insertion of the wafers and support for them. The legs preferably have a rounded wedge shape with a curved front surface of small radius cut with the slots and a curved back surface of a substantially larger radius. Preferably, the legs are machined from a round bar of virgin polysilicon. The bases may be either virgin poly or monocrystalline silicon. Various attachment methods are available for securing the legs to the bases, including fusing legs to the bases with the application of energy.