Alignment and handover calibration with hole shadows and ion implanter with e-chuck and gripper

摘要

Apparatus for detecting that two moveable parts are correctly positioned relatively to one another in a predetermined position, comprises a light source, a light sensor onto which light from the light source is projected, and a respective flag on each moveable part which produces a characteristic shadow on the light detector when in the predetermined position. The characteristic shadows of the two moveable parts are different from one another. Independent claims are also included for the following: (a) method of detecting that two moveable parts are correctly positioned; (b) method of calibrating an apparatus having a pair of moveable arms; (c) apparatus for calibrating and controlling the handoff between a gripper arm and an electrostatic chuck.