| 发明名称 |
Method of forming carbon nanotubes |
| 摘要 |
<p>A method of forming carbon nanotubes comprises growing a carbon nanotubes layer on a substrate to have a predetermined thickness by plasma deposition, purifying the layer by plasma etching and repeating the growth and the purification of the carbon nanotube layer.</p> |
| 申请公布号 |
EP1046613(A2) |
申请公布日期 |
2000.10.25 |
| 申请号 |
EP20000303469 |
申请日期 |
2000.04.25 |
| 申请人 |
ILJIN NANOTECH CO., LTD.;JIN JANG |
发明人 |
JANG, JIN;CHUNG, SUK-JAE |
| 分类号 |
C01B31/02;C23C16/26;(IPC1-7):C01B31/00 |
主分类号 |
C01B31/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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