| 摘要 |
PROBLEM TO BE SOLVED: To keep high accuracy for the optical measurement of a body to be processed through a transparent window of a processing case by a measuring device. SOLUTION: This device has a processing case 1 for subjecting a body received in the case 1 to be processed to a vacuum processing, using a processing gas. The processing case 1 has a transparent window 2 on the wall. A radiation thermometer 3, for measuring the temperature of the body received in the case 1 through the transparent window 2, is arranged outside of the window 2. A plurality of microholes 22 for preventing the formation of a thin film are formed on the inside 20 of the window 2 which faces the inside of the processing case 1. This can prevent a thin film from forming on the inside of the window 2 due to the action of the processing gas, thereby reducing decrease in the optical transmissivity of the transparent window 2 due to the formation of the thin film.
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