| 摘要 |
A semiconductor processing system, such as an ion implantation machine, includes a pair of controllers respectively disposed in high and low voltage areas of the machine, and interconnected by a fiber optic communication link. The controller located in the high voltage area employs a pair of computer processor units for respectively collecting the status of process parameters and control elements in the high voltage area, and for delivering control signals to controllable elements such as flow control valves. The controller in the low voltage area likewise employs a pair of computer processor units for generating control signals that are delivered via the fiber optic link to the first controller, and for receiving status signal information from the first controller. The fiber optic link provides high voltage isolation between the two controllers and reduces noise affecting signal accuracy.
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