| 发明名称 |
Dilute composition cleaning method |
| 摘要 |
A dilute composition cleaning method uses a cleaning composition including both phosphoric acid and acetic acid. Each of the acidic components may be at a concentration of less than about 10% by volume of a dilute composition. The dilute composition can be used for cleaning various surfaces, such as, for example, patterned metal layers and vias by exposing the surfaces to the dilute composition.
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| 申请公布号 |
US6136767(A) |
申请公布日期 |
2000.10.24 |
| 申请号 |
US19980196661 |
申请日期 |
1998.11.19 |
| 申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
HINEMAN, MAX;BLALOCK, GUY T. |
| 分类号 |
C11D7/08;C11D7/26;C11D11/00;H01L21/02;H01L21/306;H01L21/311;H01L21/3213;H01L21/768;(IPC1-7):H01L21/30;H01L21/321 |
主分类号 |
C11D7/08 |
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