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发明名称
Photomask pattern correcting method and photomask corrected by the same and photomask pattern correcting device
摘要
申请公布号
US6137901(A)
申请公布日期
2000.10.24
申请号
US19980046564
申请日期
1998.03.24
申请人
SHARP KABUSHIKI KAISHA
发明人
HARAZAKI, KATSUHIKO
分类号
G03F1/08;G03F1/36;G03F1/72;G06T7/00;H01L21/027;(IPC1-7):G06K9/00
主分类号
G03F1/08
代理机构
代理人
主权项
地址
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