| 摘要 |
PROBLEM TO BE SOLVED: To greatly decrease the gaseous impurities to be formed and to enhance the purity of formed gases by controlling the quantity of carbon which is the gaseous impurity component to be entrained in crude gases among the impurities in a nickel electrode used for an anode. SOLUTION: The gaseous trifluoride is produced by a fused salt electrolysis method using the nickel electrode for the anode and acidic ammonium fluoride as an electrolyte. The quantity of the carbon among the impurity elements included in the nickel used for the anode is limited to <=400 mass ppm, more preferably <=200 mass ppm and further preferably <=100 mass ppm, by which the formation of the gaseous impurities occurring in the carbon element is suppressed. The purity of the nickel is preferably >=98.5 mass %. The restriction of the sulfur component in the nickel to <=20 mass ppm is preferable for the purpose of suppressing the formation of gaseous SF6. The total of C, B, Si, P, As, Mo, Ge and W which are the impurity components is preferably <=400 mass ppm.
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