发明名称 |
Method for producing a microelectronic integrated cantilever |
摘要 |
A microelectronic integrated sensor is formed with a cantilever. For the purpose of ensuring a system which is especially invulnerable to mechanical strains during production, the cantilever is placed freely movably on a support, and motion limiters are provided on the edge. The invention also provides for the formation of nitride pillars for supporting the upper layers, in order to further increase the stability. A corresponding production process for producing the sensor is disclosed as well.
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申请公布号 |
US6136631(A) |
申请公布日期 |
2000.10.24 |
申请号 |
US19980195935 |
申请日期 |
1998.11.19 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
MUELLER, KARLHEINZ;KOLB, STEFAN |
分类号 |
G01P15/125;B81B3/00;G01P15/08;H01L29/84;H01L49/00;(IPC1-7):H01L21/00 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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