Method for manufacturing a thin film actuatable mirror array having an enhanced structural integrity

摘要

An inventive method for manufacturing an array of MxN thin film actuatable mirrors, the method being capable of preserving the structural integrity thereof, comprises the steps of: preparing an active matrix; depositing a passivation layer and an etchant stopping layer, successively, on top of the active matrix; forming a thin film sacrificial layer; depositing a first mask layer made of a silicon oxide; forming a second mask layer; forming an array of MxN pair of cavities, one of the cavities in each pair exposing a portion of one of the connecting terminals; removing the first and the second mask layer; forming an array of MxN actuating structures; removing the thin film sacrificial layer to thereby form the array of MxN thin film actuatable mirrors. During the formation of the cavities, the cavities is formed into a trapezoidal shape as a result of the difference in the etching rate between the first mask layer and the thin film sacrificial layer.