LASER MARKING DEVICE, OPTICAL PATH SHIELDING MEMBER THEREOF, AND OPTICAL AXIS INSPECTION INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a laser marking device capable of inspecting shift of an optical axis with an optical path of laser beam shielded. SOLUTION: In this laser marking device where laser beam emitted from a laser beam source is guided onto a mask through an optical system accommodated in a shielding structure to transfer a pattern provided on the mask to a subject to be transferred, a holder 31 capable of holding a screen 35 for copying a shape of laser beam can be inserted into a correct position in the shielding structure. For example, a connector box 20 is placed between a mirror box 15 of hollow structure for accommodating a mirror 18 and a delivery tube 16 for covering the optical path of incident laser beam in the mirror box 15, and the holder 31 can be inserted into the optical path through a slit 22a of the connector box 20.