发明名称 PERIPHERAL ALIGNER AND EXPOSING METHOD
摘要 PROBLEM TO BE SOLVED: To implement low costs, provide excellent durability and improve throughput by providing a first long arc type electric discharge light source and a second long arc type electric discharge light source. SOLUTION: Driving units 17 and 27 are provided for moving the whole bodies of first and second lighting units 10 and 20 including electric discharge lamps 11 and 21 in a direction along an exposing width. Further, the whole body of each of the units 10 and 20 is moved independently through the corresponding one of the units 17 and 27. An optical edge beam remover apparatus is provided with moving guides for moving the unit 10 and 20 in the direction toward the sheet, whereby the units 10 and 20 can move in the predetermined directions by the guides. As electric discharge light sources for the units 10 and 20, long arc type lamps 11 and 21 each having a single lamp are preferred to be used. Further, electric discharge type long lamps, each including, for example, three black lights arranged in parallel with the corresponding lighting unit, may also be used.
申请公布号 JP2000299272(A) 申请公布日期 2000.10.24
申请号 JP19990107280 申请日期 1999.04.14
申请人 NIKON CORP 发明人 KOYAMA MOTOO;KATO MASANORI;MURAKAMI MASAKAZU;KIKUCHI TETSUO
分类号 H01L21/027;G03F7/38;(IPC1-7):H01L21/027 主分类号 H01L21/027
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