| 摘要 |
PROBLEM TO BE SOLVED: To provide a moving stage device in which the height of a sample placement face is reduced to provide high vertical rigidity from the face to a base. SOLUTION: This device comprises a base 1 having a horizontal guide surface 1a, and when one of two axes which orthogonally intersect each other within the horizontal plane of the base 1 is used as X-axis while the other of the two axes is used as Y-axis, a Y-axis stage 2 is fixed on one side of the base 1 while an X-axis stage 3 is placed on the guide surface 1a of the base 1 and connected to the Y-axis stage 2 by a stage connecting member 4. A sample stage 6 is directly placed on the guide surface 1a of the base 1 and a sample 7 is placed thereon. The sample stage 6 is connected to the X-axis stage 3 by a sample stage connecting member 5. The Y-axis stage 2 causes the X-axis stage 3, the sample stage connecting member 5, and the sample stage 6 to reciprocate in the direction of the Y-axis via the stage connecting member 4, and the X-axis stage 3 causes the sample stage 6 to reciprocate in the direction of the X-axis via the sample stage connecting member 5. Therefore, the sample stage 6 can be moved freely on the guide surface 1a of the base 1 and any desired position of the sample 7 placed on the sample stage 6 can be adjusted to a position directly below an observation head 10.
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