| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared ray detector of small size, high productivity, and low cost. SOLUTION: Related to an infrared ray detection element substrate 16, a substrate 1 permeable of infrared ray is provided with void parts 14 and 15, starting from a front surface side not reaching a rear surface side, and infrared ray detection elements 2 and 3 are formed at the void parts 14 and 15. An electrode 4 is formed at the infrared ray detection elements 2 and 3, which is electrically connected to an electrode 6 of an insulating substrate 8 through a protrusion electrode 5. The electrode 6 is connected to an external circuit through a side-surface electrode 7. At the insulating substrate 8, a void part 10 is so provided as to face the void parts 14 and 15. The infrared ray detection element substrate 16 is fixed to the insulating substrate 8 with an adhesive member 11. With the use of a single crystal substrate of plane-azimuth (100) as the substrate 1, the void parts 14 and 15 with bottom surfaces 14a and 15a flat are formed.
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