| 摘要 |
PROBLEM TO BE SOLVED: To detect and monitor the level of a trace gas and air in a vacuum system by a method wherein two or more partial pressure analyzers which are coupled to a common manifold are installed at a leak detecting device. SOLUTION: This leak detector 50 is provided with a manifold 52 one end of which is provided with an entrance port 54 connected to an object, to be inspected, so as to be detachable. A partial pressure analyzer 56 is coupled to the manifold 52 via a pipe 58. A valve 60 is arranged and installed inside the pipe 58, and the partial pressure analyzer 56 and the manifold 52 are made to communicate selectively during an operation. The partial pressure analyzer 56 comprises a capability which detects the component of air, in detail, oxygen (atomic weight: 32) and nitrogen (atomic weight: 28). A second partial pressure analyzer 72 is coupled to a second vacuum pump 70 via a diffusion pipe 74, Preferably, the second partial pressure analyzer 72 is provided with a magnetic sector mass spectrometer, and it is factory-tuned so as to detect helium, neon and argon from other gases.
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