| 摘要 |
PROBLEM TO BE SOLVED: To direct clean air in a clean room downward straight from above, and to eliminate the surge voltage or leak current caused by switching frequency generated from an inverter unit. SOLUTION: Related to a drive device for fan filter units 3 which are fitted to the ceiling of a clean room 1 and control the flow of clean air in the clean room 1, a motor 4 which drives the fan filter unit 3 is equipped with an inverter unit 5 for changing the speed of the motor 4, allowing independent operation for each fan filter unit 3.
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