METHOD FOR CONTROLLING OPERATION OF ORGANOHALOGEN COMPOUND DECOMPOSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for controlling the operation of an org. halogen compd. decomposing device capable of surely and stably changing the org. halogen compd. such as gaseous fluorocarbon to plasma and to provide a method for controlling the operation of the org. halogen compd. decomposing device capable of improving the safety of the org. halogen compd. decomposing device. SOLUTION: In the method for controlling the operation of the org. halogen compd. decomposing device in which the org. halogen compd. is changed to the plasma and allowed to react with water to decompose the org. halogen compd., the supply of gas into a device system is started in the order of rare gas and the org. halogen compd., and also the gas is ignited to generate the plasma before the starting of the supply of the org. halogen compd. and the supply of the rare gas is stopped after the starting of the supply of the org. halogen compd.