| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron emissive element by forming a conductive organic film made of a polymer and a conductive material on a substrate, feeding a current to it, and forming a gap and a carbonized region at part of the film. SOLUTION: Electrodes 2, 3 with the thickness of tens nm to severalμm are formed with a general conductor material such as a printed conductor made of a metal, or an alloy, or a metal or a metal oxide and glass are formed on a substrate 1 made of quartz glass. A mixed liquid 6 constituted of a solvent of N,N-dimethyl acetamide, graphite fine grains with the grain size of 1μm or below, and poly (pyromellitic acid dimethyl ester) is applied on the electrodes 2, 3 by a spinner, then it is heated and baked to obtain a conductive organic film 4. The processed substrate 1 is put in vacuum of about 10-6 Pa, a voltage is applied between the electrodes 2, 3 for energization forming. Part of the organic film 4 is carbonized into graphite or amorphous carbon 8, and a gap 7 is formed.</p> |
